CRYSTAR® silicon carbide vertical components provide the strength and durability needed in wafer processing applications. Able to withstand temperatures up to 1300°C, CRYSTAR Vertical components can be used in a range of processes, including LPCVD and high temperature applications. The outstanding material properties of CRYSTAR silicon carbide means repeatability and reliabilty.
CRYSTAR vertical products are manufactured and supplied to meet all OEM standards and qualifications. Specific designs have also been designed and manufactured to solve customer-specific problems.
CVD coating is standard on all CRYSTAR vertical products. CRYSTAR CVD coatings provide the highest purity silicon carbide available for semiconductor processing.
CRYSTAR vertical products include:
- Boats
- Pedestals
- Liner Tubes
- Baffles
- Injectors
- Accessories