Saint-Gobain Semiconductor Components
Saint-Gobain Semiconductor Components
Applications
Horizontal Furnace

CRYSTAR revolutionized the industry when it introduced the cantilever paddle in 1980. Today, CRYSTAR® horizontal products are the leaders in the industry due to product strength and reliability. A complete range of CRYSTAR products and accessories is manufactured for use in all applications. All CRYSTAR horizontal components are available with high purity CVD coating. 

MRL-1148-Gen2-pd

1148 Gen II Horizontal Furnace featuring CRYSTAR Silicon Carbide.  
Photo courtesy of MRL Industries, Inc.
 


CRYSTAR Components are effective in processing temperatures up to 1300°C. LPCVD depositions adhere well to the CRYSTAR material surface, meaning particle shedding is less likely. Thermal expansion characteristics similar to common depositions also aids in lowering particle generation. In high temperature processing, the CRYSTAR material withstands high thermal variations and resists warping and cracking.

Wafer Boats

     

Paddles